Dry Pump Repair and Rebuild Services

2 Year Warranty: All ADVACO pump rebuilds are covered by our exclusive two year warranty, from the date of installation, against defects in parts and workmanship.

ADVACO provides the highest quality rebuild service available for your Edwards, Ebara, Busch, and Alcatel dry pumps including support for legacy Edwards IL70 and IL600 pumps.

As an independent rebuild facility, ADVACO offers a truly objective rebuild service with the sole goal of keeping your existing vacuum equipment running.

What's Included In ADVACO's Vacuum Pump Rebuild and Services

  • Two Year Warranty:
    The best in the industry — parts and labor guaranteed two full years from the time your pump is installed at your facility, against defects in parts and workmanship.
  • Comprehensive Documentation:
    The entire service history is documented and archived for future retrieval, report generation or data/trend analysis.
  • Detailed Failure Analysis Options: ADVACO offers multiple failure analysis options to meet your budgetary and data collection requirements.
  • Factory Trained Technicians:
    Our technicians are factory trained to ensure your rebuild project maintains high reliability and durability.
  • ISO9001:2015 Registered:
    ADVACO's quality system is ISO9001:2015 registered.
  • Computerized Testing:
    Calibrated test equipment and components are utilized to verify and record all official operating parameters, and the output is provided with each shipment.
  • Environmental Compliance: Registration with EPA #MDD985419076. ADVACO adheres to proper disposal methods to ensure the safety of our environment.
  • Fast Turnaround:
    ADVACO will meet your schedule and delivery requirements.
  • Proactive Uptime Program
    Customer specific programs can be designed to maximize pump life.
  • Priority Services: Expedited service available upon request.
  • Pick-Up & Delivery Available:
    Available everywhere - we can coordinate the transport of your equipment to and from your facility.
  • In-house Machine Shop:
    Enables us to remanufacture major parts to reduce cost and maintain serviceability

ADVACO's Vacuum Pump Rebuild and Service Process

Disassembly and Cleaning

Via state-of-the-art, EPA compliant systems

Inspection and Quotation

Certified Vacuum Technicians utilizing specially designed and calibrated instruments will thoroughly inspect all of the unit’s components (including electrical and diagnostic systems) vs original OEM specifications.

All consumable items quoted for replacement.

Major components that do not meet original OEM specifications are quoted for replacement or re-manufacturing in our in-house machine shop (at considerable cost savings).


Unit will be re-assembled in one of our dedicated manufacturing cells.

Testing and Quality Control

  • Extensive post re-manufacturing testing via proprietary software/hardware generating graphical data certifying both ultimate vacuum and pumping speed.
  • Applicable equipment software verified and re-set (run hours, etc.).
  • Inboard and Outboard Helium Leak Testing

Semiconductor Dry Vacuum Pumps We Rebuild

Search through our vacuum pump table to find your pump.

Manufacturer Series  Pump Model
Alcatel / Adixen / Pfeiffer ACP ACP15, ACP20, ACP28, ACP40
Alcatel / Adixen / Pfeiffer ADP ADP31, ADP80, ADP81, ADP112, ADP122
Alcatel / Adixen / Pfeiffer ADS ADS122, ADS301, ADS501, ADS602, ADS1202
Alcatel / Adixen / Pfeiffer IPUP A100L, A100V
Alcatel / Adixen / Pfeiffer Drytel Drytel 31, Drytel 34, Drytel 100, Drytel 1025
Busch Dry Pumps COBRA NX 0450, COBRA NX 0650, COBRA NC 0100, COBRA NC 0200, COBRA NC 0300, COBRA NC 0400, COBRA NC 0630, COBRA NC 1000, COBRA NC 2500, COBRA DL 0080 , COBRA DS 0080, COBRA DL 0160, COBRA DS 0160, COBRA DS 0600, COBRA DS 0700, COBRA DS 1000, COBRA DS 2000, COBRA DS 2610, COBRA DS 3010, COBRA DS 5161, COBRA DS 9161, COBRA DS 8162, COBRA DS 8163, COBRA BA 0100, COBRA BC 0100, COBRA BC 0101, COBRA BC 0600, COBRA BC 1000, COBRA BC 2000
Busch Dry Pump Controllers 0985-523-545, 0985-523-593, 0985-524-593, 0985-527-002, 0985-527-020, 0985-527-021, 0985-529-050, 0985-532-727
Ebara EV-A EV-A03, EV-A06, EV-A10
Ebara EV-M EV-M20N, EV-M102N, EV-M202N, EV-M302N, EV-M502N, EV-M802N
Ebara EV-S EV-S20, EV-S20P, EV-S20N, EV-S50, EV-S50P, EV-S50N, EV-S100, EV-S100P, EV-S100N, EV-S200, EV-S200P, EV-S200N
Ebara EST EST25N, EST100WN, EST101WN, EST200WN, EST300WN, EST500WN, EST800WN
Ebara ESA ESA25S, ESA25D, ESA25XW, ESA70W, ESA80W, ESA100W, ESA200W, ESA300W, ESA500W
Ebara UERR 40X20, 50X20, 65x40, 80X25, 150X40
Ebara A A07V, A10S, A25S, A30W, A70W, A150WM, A150WT
Ebara AA AA10N, AAL10, AA20, AA30, AA40WN, AA70WN, AA100WN, AA200WN, AA300WN
Edwards GX GX100, GX600, GX1000
Edwards iGX iGX100L, iGX100N, iGX100M, iGX100MTI, iGX300, iGX600N, iGX600L, iGX600M, iGX1000
Edwards iH iH35, iH80, iH160, iH600, iH1000, iH1800, iH600SC, iH1000SC, iH1000HTX, iH1800SC, iH1800HTX
Edwards IL IL70, IL600
Edwards IXH IXH100, IXH200, IXH610, iXH1210, iXH1220, iXH1820, IXH3030, IXH3045, IXH4545, IXH6045
Edwards iXL iXL120, iXL250, iXL500, iXL750
Edwards QDP QDP40, QDP80
Edwards iQDP iQDP40, iQDP80
Edwards EDP EDP80, EDP160, EDP200, EDP250, EDP400
Edwards GV GV80, GV160, GV250, GV400, GV600
Edwards DP DP40, DP80
Edwards CDP CDP40, CDP80
Edwards Controllers Q Controller, MCM, Motor Control Module, A38059000, A38128100, A38201000, A38203000, A38209000, A38221000, A38225000, A38229000, A38233000, Q80.4.2.2
Danielson Tribodyne DanVac TD-30/16, DanVac TD-30/120-HVP
KNF Neuberger Diaphragm Pumps UN840.3FTP
Pfeiffer Diaphragm Pumps PM12569-840.3
Thomas Diaphragm Pumps 688CE44
Vacuubrand Diaphragm Pumps MD8, MD4, MD4NT
Manufacturer Series  Pump Model

Request Information

We offer expert rebuilds, re-manufactured units, and technical assistance for your vacuum pumps. Select an option below or call us at (800) 272-2525 so our team can help you as quickly as possible.