Advanced Vacuum Company provides single source service for the semiconductor industry.  With years of successful on-site service experience we are able to offer world class support to your organization.  Our extensive knowledge of the different types of vacuum systems and abatement tools enable us to extend equipment life and production up time for increased efficiency and optimum cost savings.

• Pump Proficiencies
  • Site Pump Support
    • All varieties of wet pumps
    • Dry Pumps
      • Edwards Q, iQ, iH, iL, iGX
      • Busch
      • Ebara
      • Alcatel
      • Kashiyama
    • Cryo Pumps
    • Turbo Pumps
    • Energy Efficiency Modules available for Edwards legacy dry pumps
  • Training support
    • Formal classroom training (pump model dependent)
    • In shop hands on training (ADVACO shop)
    • Technician certification levels

Edwards TPU

• Abatement Proficiencies
  • Point of Use Abatement
    • Edwards
      • TPU    
      • TCS
      • Helios
      • GRC
    • Ecosys
      • Delatech CDO
      • Vector
      • Guardian
      • Novapure
    • PureAir
      • EDOC
      • SDOC
  • Training Support
    • Formal classroom training
      • Edwards TPU, TCS, Helios, GRC as standard
      • Ecosys/PureAir (as needed, customer driven)
    • Technician Certification
      • Levels 1 and 2 on Edwards Abatement
      • Ecosys/PureAir and others as needed (customer driven)

• Ancillary Equipment Support
  • Chillers
  • Heat Exchangers
  • Cold Traps
  • Forelines
  • Exhaust Lines
  • Gate Valves
  • Heat Trace
  • Distributed Subfab Tool Networks (i.e. VPMS, EPMS)
  • Cryo Compressor Service

• Electronic Data Acquisition
  • MTTR
  • MTBF
  • Tool Availability
  • Predictive Failure Mode Analysis (data trending)
  • Predictive Maintenance Event and Time Tracking

Contact ADVACO today to discuss your specific service needs and we will develop a comprehensive cost effective site service plan for you.