Vacuum Pump Oil Flitration Systems vacuum pump troubleshooting
   
Refurbished Dry (Semiconductor Type) Vacuum Pump
 

ADVACO maintains an extensive inventory of used dry vacuum pumps that can be refurbished to your exact specifications. When selecting a refurbished dry vacuum pump some of the specifications you should consider are:

  • Pumping Speed / Displacement
  • Application
    • Load lock, Etch, MOCVD, etc.
  • System Configuration
    • Dry pump only
    • Dry pump w/blower
      • Direct mount blower
      • Frame mount blower
    • Enclosures
  • Gas Module
    • Clean process
    • Medium process
    • Harsh process

If you would like a quotation or help selecting a pump, contact ADVACO with your requirements and we will be glad to size and select an appropriate pump for your application.

BOC Edwards Dry Vacuum System



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Advanced Vacuum Company, Inc.
1215 Business Parkway North, Westminster, MD 21157
1-800-272-2525 (410) 876-8200 FAX (410) 876-5820

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